3D Imaging and Metrology System for Submicron Level accurate measurements

The EyeVision software by EVT now also supports the FocalSpec 3D Line Confocal Scanner LCI.
This is an automated optical 3D imaging and metrology system for submicron level accurate measurements on any material. It is a stand-alone system used in state-of-the-art R&D laboratories, smart manufacturing, and quality control.
Line Confocal Imaging (LCI) technology enables customers to model the most demanding surfaces and shapes, even mirror-like, curved and transparent objects. The LCI sensor detects millions of 3D points per second, and it can distinguish irregularities of less than one micron. The LCI consists of a light source and a CMOS array which are arranged in an angle to each other.

The EyeVision software can carry out different measurements on the captured point cloud and profile. The Metrology command set as well as the 3D Profile commands can be applied to the scans. The Profile Match command for example can compare previously configured profiles with the scanned profile and therefore can detect defect profiles.
The LCI is the solution for challenges such as e.g. that devices are becoming smaller and thinner and the materials and shapes designed more complex. In addition it has been difficult carrying out sufficiently accurate measuring during actual production, resulting in costly halts.
Compared to the old measuring methods, with the special 3D technology „Line Confocal Imaging (LCI)“ laboratory level accuracy is achievable in an industrial environment. The LCI technology delivers accurate data and high-resolution 3D imaging of metal, glass, paper or plastic surfaces.
The LCI delivers automated, high-speed and high-precision scans of challenging surfaces and shapes, such as mirror-like, curved or multi-layered transparent objects.

Comparison with Lasertriangulation:

LCI Laser
yes Glossy material limited
yes Mirror-like surface no
yes Transparent material limited
Excellent Tolerance for surface angle variations limited
yes Curved transparent surface limited
yes Multi-layered transparent object no
< 1 µm Precision limited
yes Speckle free no
yes Simultaneous 3D and 2D imaging no

What does LCI measure?

The LCI can measure 3D topography and dimensions. It can make tomographic imaging of transparent objects as well as high-precision 2D imaging with extended sharp focus range.

3D profiles Flatness Distance
Roughness Gap and offset Angle
Surface texture Clearance Area
Thickness Burr height Volume
Step height Seal width Coplanarity

Industries for the LCI technology

Consumer electronics

The LCI can measure a curved glass display of a smart phone to detect the shape of the glass. It can also measure the gap and offset between the glass and the frame.

Medical devices

With the LCI technology a sheet of printed biosensors can be scanned. The 3D dimensions and the surface roughness of the active area can also be detected. Also the thickness of the conductive ink can be measured.

Microfluidics

The LCI can scan transparent microfluidics chips and detect 3D dimensions of the microchannels. Also height and width of the channels can be measured.

Advanced packaging

The seal quality can be detected from the 2D intensity images. The quality of the samples range from good (left) to failed (right).

 

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